Limitations and Advantages of Raman Spectroscopy for the Determination of Oxidation Stresses

International audienceRaman spectroscopy has in recent years been used by several research groups to study the stresses that develop in thermally grown oxide layers, particularly Cr(2)O(3), at elevated temperatures between 700 and 900 A degrees C. This paper presents an overview of the Raman technique and describes quantitatively the factors that, in addition to stress, affect the Raman peak shifts, including temperature, non-stoichiometry, impurities, stresses and instrumental calibration. It also summarizes and reviews published work in this area and in doing so, discusses the pros and cons of this technique for oxidation stress measurements