Application of Iterative Learning Control in X-Y Precision Planar Motion Platform

The size of the tracking error is one of the important indicators to measure the control system of the X-Y Precision Planar Motion Platform. Iterative learning control (ILC) can obtain higher tracking accuracy through multiple iterations. However, it is found in experiments that the tracking error of the XY precision motion stage using ordinary PD-type iterative learning will eventually fluctuate in a relatively range, and some high-frequency Noise will seriously affect the stability of the system after many iterations. Aiming at the above problems, a PD-type variable gain open-closed loop ILC with a low-pass filter is proposed. This control scheme can effectively remove high-frequency noise and reduce tracking errors. Finally, a hardware-in-the-loop real-time simulator is used to conduct a comparative experiment. Through comparison with PID controller and ordinary PD-type ILC, the experimental consequence show that this arithmetic has a smaller tracking error than the other two algorithms