Confidence of Reported Information for Real Time in Diagnosis of Complex Discrete Events Systems: A Semiconductor Application

International audienceNowadays, Semiconductor Manufacturing is operating in an intense competitive environment. These companies are developing manufacturing solutions to improve the quality of the process which improves the production equipment effectiveness. We can cite many different directions such as virtual metrology, dynamic control plan, and maintenance, etc. In this paper, we propose to contribute to an on-line diagnosis method helping human operator to identify equipments at the origin of a propagated failure. Our contribution consists in providing an on-line confidence calculating module of the data issued from the manufacturing equipments. Bayesian networks theory and Naïve algorithm are at the base of the proposed approach