MLS-based technique for MEMS characterization

International audienceWe will present a technique based on Impulse Response (IR) evaluation using pseudo-random MaximumLength Sequences (MLS). We will demonstrate the use of this technique for a fast and accurate broadband determination of MEMS behaviour, in particular for the characterisation of MEMS structures such as cantilevers bridges, and membranes determining their mechanical and thermal behaviour using just electrical tests