Exploration of micro-acoustic spectrometry techniques

This master’s thesis aimed at exploring the field of micro-acoustic spectrometry using surface acoustic waves. The objectives of this project were to design and fabricate a platform for the detection and characterization of bioentities. Design of a delay line based on the experience and knowledge of the ANEMS group and on investigation of existing solutions was performed. Different configurations and types of transducers were simulated to come up with some meaningful designs for fabrication. The devices were fabricated in the clean rooms at EPFL with a specific process flow used for the suspended structures. Extensive simulation of bidirectional and unidirectional transducers were carried out in order to understand their behavior and to be able to use them as the elements of the sensing platform. Setbacks prevented the completion of the fabrication and no real measurements could be done before the end of this project, but the simulations gave nice perspectives for the targeted application. The potential of surface acoustic waves to detect modifications in the elasticity or the density of a material could be witnessed in the last simulations