Magnetron discharges have applications in the materials processing industry for the fabrication of thin films via sputter deposition. Despite their wide use, the underlying physics of the discharge is not well understood. In particular, the transport mechanisms that enable the electrons to migrate across magnetic field lines at low pressures have not been conclusively established. The research reported in this thesis is directed toward understanding this problem further
A model for an abnormal glow discharge, including a self‐consistent analysis of the cathode fall, wa...
The magnetron sputter tool has been employed for many years to manufacture engineering-quality thin ...
In spite of being an established thin film coating technology for more than two decades, magnetron s...
Numerical modelling of an electrical discharge by fluid model can be accomplished through different ...
A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar ma...
Abstract –- A phenomenological model of DC magnetron discharge has been created on basis of probe me...
Pulsed DC operation of magnetrons is a relatively new sputtering technique that significantly improv...
Abstract—A self-consistent 2d3v numerical model based on the Particle-in-cell/Monte Carlo collisions...
In this paper, some modelling approaches to describe direct current (dc) magnetron discharges develo...
Current-voltage characteristics of the planar magnetron are studied experimentally and by numerical ...
Time-resolved images of the optical emissions from a pulsed dc titanium target planar rectangular sp...
Thesis (M.S.) University of Alaska Fairbanks, 1978Trajectories of charged particles in the tail regi...
In this research, the electrical characteristics of glow discharge plasma were studied. Glow dischar...
The influence of the starting conditions and sheath thickness on the magnetron discharge is investig...
Sputter deposition is an important technology, which is widely used in the production of thin films ...
A model for an abnormal glow discharge, including a self‐consistent analysis of the cathode fall, wa...
The magnetron sputter tool has been employed for many years to manufacture engineering-quality thin ...
In spite of being an established thin film coating technology for more than two decades, magnetron s...
Numerical modelling of an electrical discharge by fluid model can be accomplished through different ...
A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar ma...
Abstract –- A phenomenological model of DC magnetron discharge has been created on basis of probe me...
Pulsed DC operation of magnetrons is a relatively new sputtering technique that significantly improv...
Abstract—A self-consistent 2d3v numerical model based on the Particle-in-cell/Monte Carlo collisions...
In this paper, some modelling approaches to describe direct current (dc) magnetron discharges develo...
Current-voltage characteristics of the planar magnetron are studied experimentally and by numerical ...
Time-resolved images of the optical emissions from a pulsed dc titanium target planar rectangular sp...
Thesis (M.S.) University of Alaska Fairbanks, 1978Trajectories of charged particles in the tail regi...
In this research, the electrical characteristics of glow discharge plasma were studied. Glow dischar...
The influence of the starting conditions and sheath thickness on the magnetron discharge is investig...
Sputter deposition is an important technology, which is widely used in the production of thin films ...
A model for an abnormal glow discharge, including a self‐consistent analysis of the cathode fall, wa...
The magnetron sputter tool has been employed for many years to manufacture engineering-quality thin ...
In spite of being an established thin film coating technology for more than two decades, magnetron s...