Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements. In this paper, two novel CMUTs are proposed for the first time to improve the measuring performance of micro-pressure in the range of 0–10 kPa. The core concept of the enhancement is strengthening membrane deformability by partly adjusting the CMUT framework under the combined action of electrostatic force and uniform pressure. Two modified structures of an inverted frustum cone-like cavity and slotted membrane are presented, respectively, and a...
Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to ...
This paper reports on the accurate modeling of immersion capacitive micromachined ultrasonic transdu...
Ultrasonic transducers are widely used in application fields of non-destructive testing, sensors and...
Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitorin...
AbstractThis paper presents a novel membrane design for capacitive micromachined ultrasonic transduc...
Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages ov...
Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultraso...
The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion ele...
Capacitive micromachined ultrasonic transducers (CMUTs) were reported to own high potential in air-c...
Capacitive micromachined ultrasonic transducers (CMUTs) featuring piston-shaped membranes (piston CM...
Capacitive micromachined ultrasonic transducers (cMUTs) were developed to meet the demands of the ul...
We present the operation of capacitive micromachined ultrasonic transducers (CMUTs) in permanent con...
Abstract—Capacitive micromachined ultrasonic transducers (CMUTs) have a strong potential to compete ...
Collapse mode has been proposed to improve Capacitive Micromachined Ultrasonic Transducer (CMUT) per...
Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with piezoel...
Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to ...
This paper reports on the accurate modeling of immersion capacitive micromachined ultrasonic transdu...
Ultrasonic transducers are widely used in application fields of non-destructive testing, sensors and...
Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitorin...
AbstractThis paper presents a novel membrane design for capacitive micromachined ultrasonic transduc...
Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages ov...
Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultraso...
The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion ele...
Capacitive micromachined ultrasonic transducers (CMUTs) were reported to own high potential in air-c...
Capacitive micromachined ultrasonic transducers (CMUTs) featuring piston-shaped membranes (piston CM...
Capacitive micromachined ultrasonic transducers (cMUTs) were developed to meet the demands of the ul...
We present the operation of capacitive micromachined ultrasonic transducers (CMUTs) in permanent con...
Abstract—Capacitive micromachined ultrasonic transducers (CMUTs) have a strong potential to compete ...
Collapse mode has been proposed to improve Capacitive Micromachined Ultrasonic Transducer (CMUT) per...
Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with piezoel...
Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to ...
This paper reports on the accurate modeling of immersion capacitive micromachined ultrasonic transdu...
Ultrasonic transducers are widely used in application fields of non-destructive testing, sensors and...