Design of Fast Steering Mirror Based on Displacement Amplification Mechanism

According to the current situation that the deflection angle of the piezoelectric ceramics direct drive fast steering mirror (FSM) is restricted by small elongation of piezoelectric ceramics and the large deflection angle cannot be realized, a novel piezoelectric FSM is designed. A two-stage lever-type amplification mechanism is adopted to realize the amplification of small displacement of piezoelectric ceramics and a strain gauge attached to the amplification mechanism is considered as the displacement sensor. The experimental results indicate that the deflection angle of the designed FSM is larger than 50 mrad, and the closed-loop linearity is below 0.5%, which satisfies the requirements of large deflection angle and accuracy pointing for light beam