Investigations on long-range AFM scans using a nanofabrication machine (NFM-100)
- Stauffenberg, Jaqueline
- Ortlepp, Ingo
- Reuter, Christoph
- Holz, Mathias
- Dontsov, Denis
- Schäffel, Christoph
- Strehle, Steffen
- Zöllner, Jens-Peter
- Rangelow, Ivo W.
- Manske, Eberhard
DOIAbstract
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning probe lithography (FESPL). The NFM-100 has a positioning range of Ø 100 mm, which offers, in combination with the tip-based measuring system, the possibility to analyse structures over long ranges. Using different gratings, the accuracy and the reproducibility of the NFM-100 and the AFM-system will be shown
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