SMART MICROSCOPIC ROBOTS: FROM 2D MATERIALS TO ACTUATORS TO CMOS-INTEGRATED ROBOTS

154 pagesResearch on microscopic robots – robots a few hundred micrometers in size or smaller – has demonstrated a variety of approaches for locomotion and simple functions but has not produced “smart microscopic robots” that can perform complex tasks autonomously. Recently, our group has demonstrated the first smart microscopic robots by integrating microactuators with CMOS electronics. We accomplished this by designing a new microactuator called a surface electrochemical actuator (SEA), an ultrathin actuator that bends to micron-scale radii of curvature in response to applied voltages less than a volt, and by developing processes for combining these actuators with microelectronics and releasing completed microscopic robots. In this dissertation, I will discuss our work developing SEAs and integrating SEAs with electronics as well as projects on micron-scale sensors and structures using 2D materials. I will conclude by showing the first prototype smart microscopic robots, robots that can actuate their legs independently and walk autonomously without any input of information. This work paves the way for smart microscopic robots that can sense and respond to their environment, receive commands, perform complex functions, and communicate with the outside world