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XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +

Pan, J.S.
Tay, S.T.
Huan, C.H.A.
Wee, A.T.S.

Publication date

January 1999

DOI

10.1002/(SICI)1096-9918(199911)27:113.0.CO

Publisher

Wiley

ISSN

0142-2421

Abstract

10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-JSurface and Interface Analysis2711993-997SIAN

Extracted data

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Landers, R
Rouxinol, FPM
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de Moraes, MAB
Davanzo, CU
Durrant, SF

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This work describes an XPS investigation of plasma-deposited polysiloxane films irradiated with 170 ...

ION BEAM SURFACE INTERACTION AT GRAZING INCIDENCE

H.J. Andrä
R. Fröhling
H.J. Plöhn
H. Winter
W. Wittmann

January 1979

Various observations concerning the interaction mechanism of ion beam surface interaction at grazing...

Ion beam deposition and in-situ ion beam analysis

Al-Bayati, A.H.
Orrman-Rossiter, K.G.
Armour, D.G.
Van den Berg, J.A.
Donnelly, S. E.

January 1992

The direct deposition in thin films and the production of very shallow junctions by ultralow energy ...