10.1109/OMEMS.2011.6031040International Conference on Optical MEMS and Nanophotonics41-4
[[abstract]]A novel micromachined torsional mirror for use as an optical scanner is reported in this...
The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for...
Accuracy of laser optical beam steering strongly depends on dynamic characteristics of the positioni...
AbstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstra...
10.1109/OMEMS.2010.56721542010 International Conference on Optical MEMS and Nanophotonics, Optical M...
AbstractA silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrat...
AbstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstra...
AbstractA silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrat...
10.1109/OMEMS.2012.6318890International Conference on Optical MEMS and Nanophotonics236-23
10.1088/0960-1317/21/7/075001Journal of Micromechanics and Microengineering217-JMMI
This paper presents the design of a two-axis optical MEMS mirror for use in raster scanning applicat...
Two axis optical MEMS mirrors find use in many applications including raster scanning, image project...
Fraunhofer IPMS already demonstrated a technol. for resonant 2D MEMS scanning mirrors, where the res...
An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilt...
An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilt...
[[abstract]]A novel micromachined torsional mirror for use as an optical scanner is reported in this...
The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for...
Accuracy of laser optical beam steering strongly depends on dynamic characteristics of the positioni...
AbstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstra...
10.1109/OMEMS.2010.56721542010 International Conference on Optical MEMS and Nanophotonics, Optical M...
AbstractA silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrat...
AbstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstra...
AbstractA silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrat...
10.1109/OMEMS.2012.6318890International Conference on Optical MEMS and Nanophotonics236-23
10.1088/0960-1317/21/7/075001Journal of Micromechanics and Microengineering217-JMMI
This paper presents the design of a two-axis optical MEMS mirror for use in raster scanning applicat...
Two axis optical MEMS mirrors find use in many applications including raster scanning, image project...
Fraunhofer IPMS already demonstrated a technol. for resonant 2D MEMS scanning mirrors, where the res...
An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilt...
An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilt...
[[abstract]]A novel micromachined torsional mirror for use as an optical scanner is reported in this...
The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for...
Accuracy of laser optical beam steering strongly depends on dynamic characteristics of the positioni...
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