A novel nano-mechanical displacement detection based on a photonic nanowire waveguides coupler
- Chew, X.
- Zhou, G.
- Chau, F.S.
DOIAbstract
10.1117/12.901080Proceedings of SPIE - The International Society for Optical Engineering8191-PSIS
10.1117/12.901080Proceedings of SPIE - The International Society for Optical Engineering8191-PSIS
This article belongs to the Topic Advanced Nanomaterials for Sensing Applications.In this paper, we ...
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an elec...
Nano-optomechanical sensors enable precision sensing of displacement, force and mass. However, the c...
10.1109/TRANSDUCERS.2011.59698112011 16th International Solid-State Sensors, Actuators and Microsyst...
In this paper, we propose the design of an optical system based on two parallel suspended silicon na...
Displacement sensing at the nanoscale is required in many applications, including accelerometry, mas...
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a do...
Due to copyright restrictions, the access to the full text of this article is only available via sub...
Optical read-out of motion is widely used in sensing applications. Recent developments in micro- and...
The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate ...
10.1088/0960-1317/21/6/065014Journal of Micromechanics and Microengineering216-JMMI
This article belongs to the Topic Advanced Nanomaterials for Sensing Applications.In this paper, we ...
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an elec...
Nano-optomechanical sensors enable precision sensing of displacement, force and mass. However, the c...
10.1109/TRANSDUCERS.2011.59698112011 16th International Solid-State Sensors, Actuators and Microsyst...
In this paper, we propose the design of an optical system based on two parallel suspended silicon na...
Displacement sensing at the nanoscale is required in many applications, including accelerometry, mas...
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a do...
Due to copyright restrictions, the access to the full text of this article is only available via sub...
Optical read-out of motion is widely used in sensing applications. Recent developments in micro- and...
The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate ...
10.1088/0960-1317/21/6/065014Journal of Micromechanics and Microengineering216-JMMI
This article belongs to the Topic Advanced Nanomaterials for Sensing Applications.In this paper, we ...
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an elec...
Nano-optomechanical sensors enable precision sensing of displacement, force and mass. However, the c...
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