Particle on the surface: Basic physical problems related to laser cleaning

3D effects in dry laser cleaning

Luk'Yanchuk, B.S.
Huang, S.M.
Hong, M.H.

January 2002

10.1117/12.482087Proceedings of SPIE - The International Society for Optical Engineering4760I204-210...

Effect of wavelength and incident angle in the laser removal of particles from silicon wafers

January 2015

As semiconductor and microelectronic devices are becoming increasingly smaller, surface contaminatio...

Laser cleaning of alumina particles on glass and silica substrates : experiment and quasistatic model

Pleasants, S
Kane, D. M

January 2003

Silica and microscope slides that had been pretreated with a variety of wet chemical, ultrasonic and...

Laser surface cleaning - basic understanding, engineering efforts and technical barriers

Lu, Y.F.
Song, W.D.
Hong, M.H.
Ren, Z.M.
Zheng, Y.W.

January 2000

Proceedings of SPIE - The International Society for Optical Engineering4088371-379PSIS

Science and engineering in laser surface cleaning

Lu, Y.F.
Song, W.D.
Hong, M.H.
Ren, Z.M.
Zheng, Y.W.

January 2000

Proceedings of SPIE - The International Society for Optical Engineering4065588-599PSIS

Laser surface cleaning of electronic materials

Lu, Y.F.
Song, W.D.
Zhang, Y.
Zheng, Y.W.

January 1999

Proceedings of SPIE - The International Society for Optical Engineering3618278-289PSIS

Laser surface cleaning and real-time monitoring

Lu, Y.F.
Song, W.D.
Hong, H.M.
Zheng, Y.W.

January 2000

Proceedings of SPIE - The International Society for Optical Engineering4070331-337PSIS

Cleaning force in laser cleaning of silicon substrates

Song, W.D.
Lu, Y.F.
Ye, K.D.
Tee, C.K.
Hong, M.H.
Liu, D.M.
Low, T.S.

January 1997

10.1117/12.280569Proceedings of SPIE - The International Society for Optical Engineering3184158-165P...

Influence of surface morphology to laser cleaning efficiency

Zheng, Y.W.
Lu, Y.F.
Mai, Z.H.
Song, W.D.

January 1999

Proceedings of SPIE - The International Society for Optical Engineering3898287-296PSIS

Laser cleaning of microparticles - Theoretical prediction of threshold laser fluence

Lu, Y.F.
Song, W.D.
Hong, M.H.
Chan, D.S.H.
Low, T.S.

January 1997

Proceedings of SPIE - The International Society for Optical Engineering3097352-357PSIS

A new mechanism of laser dry cleaning

Luk'yanchuk, B.S.
Zheng, Y.W.
Lu, Y.F.

January 2000

10.1117/12.431213Proceedings of SPIE - The International Society for Optical Engineering4423115-126P...

Laser cleaning of particles from silicon wafers : capabilities and mechanisms

Graf, Johannes
Lang, Florian
Mosbacher, Mario
Leiderer, Paul

January 2005

The preparation of surfaces free of particle contamination is one of the crucial prerequisites for a...

Laser Assisted Particle Removal \u27Dry\u27 Cleaning of Critical Surfaces

Allen, S. D.
Miller, A. S.
Lee, S. J.

September 1997

Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces us...

Laser cleaning II

Kane, D. M.

January 2006

Laser Cleaning II is the second of a series of books reporting research on the use of lasers for cle...

Laser dust removal: mechanisms and applications

Delaporte, Ph.
Vatry, A.
Grojo, D.
Itina, T.
Gouriet, K.
Sentis, M.
Grisolia, C.
Rosanvallon, S.

July 2007

The presence of particles on surfaces can be a strong problem in terms of pollution (optics), defect...

3D effects in dry laser cleaning

Luk'Yanchuk, B.S.
Huang, S.M.
Hong, M.H.

January 2002

10.1117/12.482087Proceedings of SPIE - The International Society for Optical Engineering4760I204-210...

Effect of wavelength and incident angle in the laser removal of particles from silicon wafers

January 2015

As semiconductor and microelectronic devices are becoming increasingly smaller, surface contaminatio...

Laser cleaning of alumina particles on glass and silica substrates : experiment and quasistatic model

Pleasants, S
Kane, D. M

January 2003

Silica and microscope slides that had been pretreated with a variety of wet chemical, ultrasonic and...

Laser surface cleaning - basic understanding, engineering efforts and technical barriers

Lu, Y.F.
Song, W.D.
Hong, M.H.
Ren, Z.M.
Zheng, Y.W.

January 2000

Proceedings of SPIE - The International Society for Optical Engineering4088371-379PSIS

Science and engineering in laser surface cleaning

Lu, Y.F.
Song, W.D.
Hong, M.H.
Ren, Z.M.
Zheng, Y.W.

January 2000

Proceedings of SPIE - The International Society for Optical Engineering4065588-599PSIS

Laser surface cleaning of electronic materials

Lu, Y.F.
Song, W.D.
Zhang, Y.
Zheng, Y.W.

January 1999

Proceedings of SPIE - The International Society for Optical Engineering3618278-289PSIS

Laser surface cleaning and real-time monitoring

Lu, Y.F.
Song, W.D.
Hong, H.M.
Zheng, Y.W.

January 2000

Proceedings of SPIE - The International Society for Optical Engineering4070331-337PSIS

Cleaning force in laser cleaning of silicon substrates

Song, W.D.
Lu, Y.F.
Ye, K.D.
Tee, C.K.
Hong, M.H.
Liu, D.M.
Low, T.S.

January 1997

10.1117/12.280569Proceedings of SPIE - The International Society for Optical Engineering3184158-165P...

Influence of surface morphology to laser cleaning efficiency

Zheng, Y.W.
Lu, Y.F.
Mai, Z.H.
Song, W.D.

January 1999

Proceedings of SPIE - The International Society for Optical Engineering3898287-296PSIS

Laser cleaning of microparticles - Theoretical prediction of threshold laser fluence

Lu, Y.F.
Song, W.D.
Hong, M.H.
Chan, D.S.H.
Low, T.S.

January 1997

Proceedings of SPIE - The International Society for Optical Engineering3097352-357PSIS

A new mechanism of laser dry cleaning

Luk'yanchuk, B.S.
Zheng, Y.W.
Lu, Y.F.

January 2000

10.1117/12.431213Proceedings of SPIE - The International Society for Optical Engineering4423115-126P...

Laser cleaning of particles from silicon wafers : capabilities and mechanisms

Graf, Johannes
Lang, Florian
Mosbacher, Mario
Leiderer, Paul

January 2005

The preparation of surfaces free of particle contamination is one of the crucial prerequisites for a...

Laser Assisted Particle Removal \u27Dry\u27 Cleaning of Critical Surfaces

Allen, S. D.
Miller, A. S.
Lee, S. J.

September 1997

Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces us...

Laser cleaning II

Kane, D. M.

January 2006

Laser Cleaning II is the second of a series of books reporting research on the use of lasers for cle...

Laser dust removal: mechanisms and applications

Delaporte, Ph.
Vatry, A.
Grojo, D.
Itina, T.
Gouriet, K.
Sentis, M.
Grisolia, C.
Rosanvallon, S.

July 2007

The presence of particles on surfaces can be a strong problem in terms of pollution (optics), defect...

3D effects in dry laser cleaning

Luk'Yanchuk, B.S.
Huang, S.M.
Hong, M.H.

January 2002

10.1117/12.482087Proceedings of SPIE - The International Society for Optical Engineering4760I204-210...

Effect of wavelength and incident angle in the laser removal of particles from silicon wafers

January 2015

As semiconductor and microelectronic devices are becoming increasingly smaller, surface contaminatio...

Laser cleaning of alumina particles on glass and silica substrates : experiment and quasistatic model

Pleasants, S
Kane, D. M

January 2003

Silica and microscope slides that had been pretreated with a variety of wet chemical, ultrasonic and...

Particle on the surface: Basic physical problems related to laser cleaning

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