A low-voltage vibratory microgyroscope with ASIC control
- Liang, Y.C.
- Zhao, T.
- Xu, Y.P.
- Boh, S.S.
DOIAbstract
10.1117/12.425357Proceedings of SPIE - The International Society for Optical Engineering440840-49PSIS
10.1117/12.425357Proceedings of SPIE - The International Society for Optical Engineering440840-49PSIS
In this paper, a micromachined gyroscope system composed of a vibratory gyroscope with its interface...
10.1117/12.404894Proceedings of SPIE - The International Society for Optical Engineering4230128-139P...
Micro-electromechanical gyroscope becomes one of the most valuable segments of the micro sensor mark...
IEEE Region 10 International Conference on Electrical and Electronic Technology825-82
10.1117/12.404892Proceedings of SPIE - The International Society for Optical Engineering4230109-118P...
This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromec...
ABSTRACT 4.68°/hr equivalent noise level microgyroscope is fabricated and tested with a conventional...
10.1117/12.404893Proceedings of SPIE - The International Society for Optical Engineering4230119-127P...
10.1117/12.566426Proceedings of SPIE - The International Society for Optical Engineering5625PART 278...
peer reviewedThe paper presents a novel 6th order continuous-time, force-feedback band-pass sigma-de...
The paper presents a low-noise high voltage (HV) CMOS Interface ASIC designed for MEMS vibratory gyr...
Proceedings of SPIE - The International Society for Optical Engineering4019134-144PSIS
In this paper, a novel DRIE (Deep Reactive Ion Etching) bulk-micromachined single-crystal silicon co...
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of...
This paper proposes a novel micro vibrating gyroscope. It is based on the thickness extension vibrat...
In this paper, a micromachined gyroscope system composed of a vibratory gyroscope with its interface...
10.1117/12.404894Proceedings of SPIE - The International Society for Optical Engineering4230128-139P...
Micro-electromechanical gyroscope becomes one of the most valuable segments of the micro sensor mark...
IEEE Region 10 International Conference on Electrical and Electronic Technology825-82
10.1117/12.404892Proceedings of SPIE - The International Society for Optical Engineering4230109-118P...
This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromec...
ABSTRACT 4.68°/hr equivalent noise level microgyroscope is fabricated and tested with a conventional...
10.1117/12.404893Proceedings of SPIE - The International Society for Optical Engineering4230119-127P...
10.1117/12.566426Proceedings of SPIE - The International Society for Optical Engineering5625PART 278...
peer reviewedThe paper presents a novel 6th order continuous-time, force-feedback band-pass sigma-de...
The paper presents a low-noise high voltage (HV) CMOS Interface ASIC designed for MEMS vibratory gyr...
Proceedings of SPIE - The International Society for Optical Engineering4019134-144PSIS
In this paper, a novel DRIE (Deep Reactive Ion Etching) bulk-micromachined single-crystal silicon co...
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of...
This paper proposes a novel micro vibrating gyroscope. It is based on the thickness extension vibrat...
In this paper, a micromachined gyroscope system composed of a vibratory gyroscope with its interface...
10.1117/12.404894Proceedings of SPIE - The International Society for Optical Engineering4230128-139P...
Micro-electromechanical gyroscope becomes one of the most valuable segments of the micro sensor mark...
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