Publication date
November 2002
DOI Publisher
IOP Publishing ISSN
0960-1317 Citation count (estimate)
11Abstract
10.1088/0960-1317/12/6/327Journal of Micromechanics and Microengineering126948-954JMMI
10.1088/0960-1317/12/6/327Journal of Micromechanics and Microengineering126948-954JMMI
Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Vari...
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mas...
This thesis reports on a design and modeling of a micro-machined gyroscope. The proposed sensor is a...
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of...
Cooper, George (1996) The design, simulation and fabrication of microengineered silicon gyroscopes
A novel design of a microelectromechanical systems (MEMS) control moment gyroscope (MCMG) was propos...
The invention relates to a micromechanical gyroscope comprising a substrate, at least one gyroscopic...
Microelectromechanical systems (MEMS) is an evolution and expansion of micromachining technology. ME...
This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric microma...
MasterGyroscopes (gyro) are devices that measure angle or angular rate, based on the principle of co...
Most of the current research activities in micromachined gyroscope are focusing on the design of a s...
Thesis (MTech (Electrical Engineering))--Cape Peninsula University of Technology, 2007Micro Electro-...
It is a known fact that the technology in this era is reaching new heights, with hardware and softwa...
This review surveys micromachined gyroscope structure and circuitry technology. The principle of mic...
In this paper we present an innovative approach to the automatic design of MEMS gyroscopes, based on...
Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Vari...
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mas...
This thesis reports on a design and modeling of a micro-machined gyroscope. The proposed sensor is a...
Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of...
Cooper, George (1996) The design, simulation and fabrication of microengineered silicon gyroscopes
A novel design of a microelectromechanical systems (MEMS) control moment gyroscope (MCMG) was propos...
The invention relates to a micromechanical gyroscope comprising a substrate, at least one gyroscopic...
Microelectromechanical systems (MEMS) is an evolution and expansion of micromachining technology. ME...
This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric microma...
MasterGyroscopes (gyro) are devices that measure angle or angular rate, based on the principle of co...
Most of the current research activities in micromachined gyroscope are focusing on the design of a s...
Thesis (MTech (Electrical Engineering))--Cape Peninsula University of Technology, 2007Micro Electro-...
It is a known fact that the technology in this era is reaching new heights, with hardware and softwa...
This review surveys micromachined gyroscope structure and circuitry technology. The principle of mic...
In this paper we present an innovative approach to the automatic design of MEMS gyroscopes, based on...
Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Vari...
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mas...
This thesis reports on a design and modeling of a micro-machined gyroscope. The proposed sensor is a...
Add to ORKG