Epitaxial growth of oxide thin films.

Ling Siu-hing.Title also in Chinese characters.Thesis (Ph.D.)--Chinese University of Hong Kong, 1994.Includes bibliographical references (leaves 220-227).ACKNOWLEDGEMENT --- p.iABSTRACT --- p.iiChapter Chapter 1 --- Ceramic thin film --- p.1Chapter 1. 1 --- """New stone era""---the importance of ceramics" --- p.1Chapter 1.2 --- The importance of epitaxial growth of YBCO films --- p.4Chapter 1.3 --- The importance of epitaxial growth of PZT films --- p.9Chapter 1.4 --- The similar structures of YBCO and PZT --- p.10Chapter Chapter 2 --- Epitaxy --- p.12Chapter 2. 1 --- Introduction --- p.12Chapter 2.2 --- Basic principle --- p.13Chapter Chapter 3 --- Sample preparation Techniques --- p.25Chapter 3.1 --- A glimpse at epitaxial film deposition --- p.25Chapter 3.2 --- Magnetron sputtering --- p.28Chapter 3.2.1 --- Principle --- p.28Chapter 3.2.2 --- Set-ups --- p.30Chapter 3.2.3 --- High pressure magnetron sputter gun --- p.33Chapter 3.2.4 --- Type II unbalanced magnetron gun modification --- p.42Chapter 3.3 --- Pulsed Laser Deposition (PLD) --- p.54Chapter 3.4 --- Rapid thermal annealing (RTA) --- p.62Chapter Chapter 4 --- Characterizations-principles and setups --- p.66Chapter 4.1 --- Structure-X-ray diffractometer --- p.66Chapter 4.1.1 --- Setup --- p.57Chapter 4.1.2 --- Characterization --- p.71Chapter 4.1.3 --- High temperature X-ray diffractometer (HTXRD) --- p.83Chapter 4.2 --- Surface morphology --- p.86Chapter 4.2.1 --- Scanning electron microscopy (SEM) --- p.86Chapter 4. 3 --- Composition --- p.89Chapter 4.3.1 --- Energy dispersive X-ray spectroscopy --- p.89Chapter 4.3.2 --- Rutherford backscattering spectrometry (RBS) --- p.91Chapter 4.4 --- Other characterization techniques --- p.93Chapter 4.4.1 --- Thickness measurement --- p.93Chapter 4.4.2 --- Measurement of Tc in YBCO --- p.93Chapter 4.4.3 --- Thermomechanical analysis system (TMS) --- p.95Chapter 4.4.4 --- Differential scanning calorimeter (DSC) --- p.98Chapter Chapter 5 --- Epitaxial films --- p.99Chapter 5. 1 --- YBCO films --- p.99Chapter 5.1.1 --- YBCO on sapphire --- p.99Chapter 5.1.2 --- YBCO on spinel (MgAl2O4) --- p.115Chapter 5.1.3 --- YBC0//SrTi〇3//spinel --- p.130Chapter 5.1.4. --- YBCO on Mg〇 --- p.134Chapter 5.1.5 --- YBCO on SrTi〇3(110) --- p.143Chapter 5.2 --- PZT films --- p.182Chapter 5.2.1 --- PZT on MgO --- p.182Chapter 5.2.2 --- PZT on spinel --- p.188Chapter 5.2.3 --- High temperature structural transition of PZT films --- p.195Chapter Chapter 6 --- Conclusion --- p.218REFERENCES --- p.22