Preparation of PZT thin films by pulsed laser deposition.

by Au Wing Shing.Parallel title in Chinese characters.Thesis (M.Phil.)--Chinese University of Hong Kong, 1992.Includes bibliographical references (leaves 56-58).Acknowledgements --- p.iAbstract --- p.iiTable of Content --- p.iiiChapter CHATPER 1 : --- INTRODUCTION --- p.1Chapter CHAPTER 2 ： --- EXPERIMENTAL SET-UPChapter A. --- General Description --- p.4Chapter B. --- Vacuum System and Chamber --- p.6Chapter C. --- Target Rotation and Motor Connection --- p.7Chapter D. --- Substrate Heating and Temperature Control --- p.8Chapter E. --- Pressure and Flow Control --- p.9Chapter CHAPTER 3 ： --- THICKNESS AND COMPOSITION DISTRIBUTIONS OF FILMS DEPOSITED AT ROOM TEMPERATUREChapter A. --- Experimental Details --- p.10Chapter B. --- Shape of the Plume --- p.12Chapter C. --- Effect of Laser Fluence --- p.15Chapter D. --- Investigation of the Pb Deficiency in the Deposited Film --- p.24Chapter E. --- Effect of Oxygen Pressure --- p.27Chapter CHAPTER 4 ： --- TARGET MODIFICATION AND DEPOSITION RATEChapter A. --- Introduction --- p.34Chapter B. --- Experimental Details --- p.40Chapter C.i. --- Result 1 : Normal Incidence Case --- p.41Chapter ii. --- Result 2 : 45° Incidence Case --- p.42Chapter D. --- Discussion --- p.43Chapter CHAPTER 5 : --- HIGH TEMPERATURE GROWTH ON DIFFERRENT KINDS OF SUBSTRATESChapter A. --- Introduction --- p.45Chapter B. --- Experimental Details --- p.47Chapter C. --- High Temperature GrowthChapter i. --- Films grown on MgO (100) --- p.49Chapter ii. --- Films grown on Spinel --- p.50Chapter iii. --- Films grown on c-plane Sapphire --- p.51Chapter D. --- Discussion --- p.52Chapter CHAPTER 6 ： --- OVERALL CONCLUSION AND FURTHER WORKS --- p.54References --- p.56Appendix1 --- p.59Appendix2 --- p.6