Fabrication of low-cost micro and nano cavities and channels using compact disc technology.

by Li Chong, Victor Kun Wa.Thesis (M.Phil.)--Chinese University of Hong Kong, 2003.Includes bibliographical references (leaves 99-101).Abstracts in English and Chinese.ABSTRACT --- p.i摘要 --- p.iiiACKNOWLEDGEMENT --- p.vTABLE OF CONTENTS --- p.viiLIST OF FIGURES --- p.xLIST OF TABLES --- p.xvChapter 1 --- Introduction --- p.1Chapter 1.1 --- CD Manufacturing Technology --- p.1Chapter 1.1.1 --- Electroforming --- p.2Chapter 1.1.2 --- Computer Numerical Control (CNC) --- p.2Chapter 1.1.3 --- Photolithography --- p.4Chapter 1.1.4 --- Laser --- p.5Chapter 1.2 --- Research Objective --- p.6Chapter 1.3 --- Thesis Outline --- p.6Chapter 2 --- Conversion Software (AutoGEN) --- p.9Chapter 2.1 --- Computer-Aided Design --- p.9Chapter 2.2 --- AutoCAD Programming --- p.10Chapter 2.3 --- AutoCAD Development System (ADS) --- p.11Chapter 2.4 --- AutoCAD Runtime Extension (ARX) --- p.12Chapter 2.5 --- AutoLISP Programming --- p.12Chapter 2.5.1 --- Advantages of AutoLISP --- p.13Chapter 2.6 --- Caltech Intermediate Format (CIF) --- p.14Chapter 2.6.1 --- Structure of CIF Format --- p.15Chapter 2.7 --- Architecture of Conversion Software --- p.15Chapter 2.7.1 --- Stage 1 - AutoGEN (DLTM) Module --- p.16Chapter 2.7.2 --- Stage 2 - AutoGEN (DCRM) Module --- p.17Chapter 2.8 --- DLTM Input Screen --- p.17Chapter 2.9 --- DCRM Data Screen --- p.18Chapter 2.10 --- Conversion from 2D to 3D --- p.18Chapter 2.11 --- AutoGEN - Geometric Primitive --- p.19Chapter 2.12 --- AutoGEN - Geometric Transformation --- p.19Chapter 2.13 --- Conversion of Simplified and Complex Drawings --- p.22Chapter 3 --- Manufacturing Process --- p.24Chapter 3.1 --- Stamper Manufacturing --- p.25Chapter 3.2 --- CD Manufacturing --- p.30Chapter 3.3 --- Internal Stress of Deposit in Electroforming --- p.34Chapter 4 --- CNC Approach --- p.37Chapter 4.1 --- Computer-Aided Manufacturing --- p.37Chapter 4.2 --- CNC Machining --- p.37Chapter 4.2.1 --- Experiment --- p.39Chapter 4.3 --- Advantages of CNC Approach --- p.42Chapter 4.4 --- Limitations of CNC Approach --- p.42Chapter 4.5 --- CNC and Effects of Heat Generated --- p.43Chapter 5 --- Photolithography Approach --- p.45Chapter 5.1 --- Experiment --- p.47Chapter 5.2 --- Channel Analysis --- p.49Chapter 6 --- Laser Approach --- p.53Chapter 6.1 --- Dual Beam Laser Machine --- p.53Chapter 6.2 --- Creation of Pits and Lands --- p.54Chapter 6.2.1 --- Experiment --- p.54Chapter 6.3 --- Creation of Continuous Channel --- p.56Chapter 6.4 --- Procedure of Channel Creation (NA set at a fixed constant) --- p.57Chapter 6.4.1 --- Experiment 1 --- p.59Chapter 6.4.2 --- Experiment 2 --- p.60Chapter 6.4.3 --- Experiment 3 --- p.61Chapter 6.5 --- Procedure of Channel Creation (ILV set at a fixed constant) --- p.62Chapter 6.5.1 --- Experiment 1 --- p.63Chapter 6.5.2 --- Experiment 2 --- p.64Chapter 6.5.3 --- Experiment 3 --- p.66Chapter 7 --- Photolithography Approach (Enhancement) --- p.68Chapter 7.1 --- Creation of High-Aspect-Ratio Channel --- p.68Chapter 7.1.1 --- Experiment 1 --- p.76Chapter 7.1.2 --- Experiment 2 --- p.80Chapter 8 --- Conclusion and Future Proposal --- p.83Chapter 8.1 --- Conclusion --- p.83Chapter 8.2 --- Future Proposal --- p.86APPENDIX --- p.89Chapter A.1 --- Additional Information on CNC Approach --- p.88Chapter A.2 --- Channel Dimension of Design Mask --- p.89Chapter A.3 --- Additional Information on Photolithography Approach --- p.94Chapter A.4 --- Additional Information on Laser Approach --- p.95BIBLIOGRAPHY --- p.9