Characterization of cobalt-implanted and iron-implanted titanium dioxide thin films.

Cheng, Kai Hong.Thesis (M.Phil.)--Chinese University of Hong Kong, 2004.Includes bibliographical references (leaves 134-141).Abstracts in English and Chinese.Abstract --- p.iAcknowledgement --- p.ivTable of Contents --- p.vList of Figures --- p.viiiList of Tables --- p.xixChapter iii. --- Table of ContentsChapter Chapter 1 --- Introduction --- p.1Chapter 1.1 --- Semiconductor spintronics --- p.1Chapter 1.1.1 --- Overview --- p.1Chapter 1.2 --- Dilute magnetic semiconductors (DMS) --- p.2Chapter 1.2.1 --- Historical background --- p.3Chapter 1.2.2 --- Their importance and significance --- p.4Chapter 1.2.3 --- Material systems showing room temperature ferromagnetism --- p.5Chapter 1.3 --- Cobalt (iron)-doped titanium dioxide as DMS --- p.7Chapter 1.3.1 --- Structures and properties of titanium dioxide --- p.8Chapter 1.3.2 --- Various preparation techniques of cobalt (iron)-doped titanium dioxide --- p.10Chapter 1.3.3 --- This thesis --- p.13Chapter Chapter 2 --- Sample Preparation and Characterization Techniques --- p.14Chapter 2.1 --- Sample preparation --- p.14Chapter 2.1.1 --- RF magnetron sputtering --- p.14Chapter 2.1.2 --- MEVVA ion implantation --- p.17Chapter 2.1.3 --- Sample preparation conditions --- p.19Chapter 2.2 --- Characterization techniques --- p.24Chapter 2.2.1 --- Structural characterization --- p.24Chapter 2.2.1.1 --- Rutherford backscattering spectrometry (RBS) --- p.24Chapter 2.2.1.2 --- X-ray diffraction (XRD) --- p.26Chapter 2.2.1.3 --- X-ray photoelectron spectroscopy (XPS) --- p.28Chapter 2.2.1.4 --- Transmission electron microscopy (TEM) --- p.31Chapter 2.2.2 --- Vibrating sample magnetometry (VSM) --- p.33Chapter 2.2.3 --- Temperature varying resistivity measurements --- p.35Chapter Chapter 3 --- Characterization of Titanium Dioxide Samples --- p.40Chapter 3.1 --- RBS results --- p.40Chapter 3.2 --- XRD results --- p.43Chapter 3.3 --- XPS results --- p.47Chapter 3.4 --- Summary --- p.51Chapter Chapter 4 --- Characterization of Cobalt-implanted Titanium Dioxide Sample --- p.53Chapter 4.1 --- Cobalt dose dependence --- p.53Chapter 4.1.1 --- RBS results --- p.53Chapter 4.1.2 --- XRD results --- p.65Chapter 4.1.3 --- VSM results --- p.69Chapter 4.1.4 --- Temperature varying resistivity measurements --- p.75Chapter 4.2 --- Effects of annealing temperature --- p.77Chapter 4.2.1 --- RBS results --- p.77Chapter 4.2.2 --- XRD results --- p.79Chapter 4.2.3 --- XPS results --- p.83Chapter 4.2.4 --- TEM results --- p.88Chapter 4.2.5 --- VSM results --- p.91Chapter 4.2.6 --- Temperature varying resistivity measurements --- p.97Chapter 4.3 --- Summary --- p.99Chapter Chapter 5 --- Characterization of Iron-implanted Titanium Dioxide Samples --- p.101Chapter 5.1 --- Iron dose dependence --- p.101Chapter 5.1.1 --- RBS results --- p.101Chapter 5.1.2 --- XRD results --- p.107Chapter 5.1.3 --- VSM results --- p.110Chapter 5.1.4 --- Temperature varying resistivity measurements --- p.114Chapter 5.2 --- Effects of annealing temperature --- p.116Chapter 5.2.1 --- RBS results --- p.116Chapter 5.2.2 --- XRD results --- p.117Chapter 5.2.3 --- VSM results --- p.119Chapter 5.2.4 --- Temperature varying resistivity measurements --- p.121Chapter 5.3 --- Summary --- p.122Chapter Chapter 6 --- Conclusion and future work --- p.125Appendices --- p.127Bibliography --- p.134Publications --- p.141Chapter iv. --- List of FiguresFig. 1.1 Crystal structures for two most stable polymorphs of TiO2: (a) anatase; and (b) rutile --- p.9Fig. 2.1 Schematic of RF sputtering system --- p.15Fig. 2.2 Motion of electrons emitted for the target surface (a) in the applied magnetic field (-z direction); (b) in the applied electric field (-y direction) and magnetic field (-z direction) --- p.16Fig. 2.3 Schematic of the implanter with the MEVVA ion source --- p.17Fig. 2.4 The TRIM ion distribution profile of Co atoms in anatase TiO2 by implantation to a Co dose of 2.2 x 1016 cm-2 at an extraction voltage of 65 kV --- p.2