Formation and characterization of high dose ion implanted thin layers of metal clusters embedded in silica glass.

by Chung Pui Shan.Thesis (M.Phil.)--Chinese University of Hong Kong, 2001.Includes bibliographical references (leaves 105-110).Abstracts in English and Chinese.Abstract --- p.iAcknowledgements --- p.iiiTable of contents --- p.vChapter Chapter 1. --- Introduction --- p.1Chapter 1.1 --- Metal clusters embedded in fused silica glass --- p.2Chapter 1.2 --- Ion implantation of metal clusters --- p.3Chapter 1.3 --- Feature of MEVVA implantation --- p.5Chapter 1.4 --- Motivation and organization of this thesis --- p.7Chapter Chapter 2. --- Sample Preparation and Characterization MethodsChapter 2.1 --- MEVVA implantation --- p.9Chapter 2.2 --- TRIM simulation --- p.11Chapter 2.3 --- Sample preparation --- p.14Chapter 2.4 --- Rutherford backscattering spectroscopy (RBS) --- p.16Chapter 2.5 --- X-ray diffraction (XRD) technique --- p.17Chapter 2.6 --- X-ray photoelectron spectroscopy (XPS) --- p.21Chapter 2.7 --- Transmission electron microscopy (TEM) technique --- p.24Chapter 2.8 --- Spectroscopic ellipsometry (S.E.) --- p.25Chapter 2.9 --- Z-scan technique --- p.32Chapter Chapter 3. --- Characterization of Single Implanted SamplesChapter 3.1 --- Experimental results and discussionChapter 3.1.1 --- RBS --- p.35Chapter 3.1.2 --- XRD --- p.38Chapter 3.1.3 --- XPS --- p.42Chapter 3.1.4 --- XTEM --- p.49Chapter 3.1.5 --- S.E --- p.54Chapter 3.1.6 --- Z-scan measurements --- p.60Chapter 3.2 --- Summary --- p.65Chapter Chapter 4. --- Characterization of Sequentially Cu-Ni Implanted SamplesChapter 4.1 --- Experimental results and discussionChapter 4.1.1 --- XRD --- p.66Chapter 4.1.2 --- XPS --- p.68Chapter 4.1.3 --- XTEM --- p.77Chapter 4.1.4 --- Z-scan measurements --- p.87Chapter 4.2 --- Summary --- p.91Chapter Chapter 5. --- Conclusion and Future WorksChapter 5.1 --- Conclusion --- p.92Chapter 5.2 --- Future works --- p.93AppendixAppendix I --- p.94Chapter ☆ --- Sample preparation procedures for XTEMAppendix II --- p.97Chapter ☆ --- Alignment procedures of S.E.Chapter ☆ --- Implementation of the Merlin systemAppendix III --- p.101Chapter ☆ --- Calibration of S.E.Reference --- p.10