A study of cobalt silicide formed by MEVVA implantation.

by Li Chi Pui.Thesis (M.Phil.)--Chinese University of Hong Kong, 1999.Includes bibliographical references (leaves [105]-[109]).Abstracts in English and Chinese.AbstractAcknowledgement --- p.Page noChapter Chapter 1. --- IntroductionChapter 1.1 --- Metal silicides --- p.1Chapter 1.2 --- Cobalt silicides --- p.3Chapter 1.3 --- Ion beam synthesis of metal silicides by metal implantation into silicon --- p.4Chapter 1.4 --- Feature of MEVVA implantation --- p.5Chapter 1.5 --- Motivation and organisation of this thesis --- p.6Chapter Chapter 2. --- Sample Preparation and Characterisation MethodsChapter 2.1 --- MEVVA implantation --- p.7Chapter 2.2 --- Simulation by TRIM --- p.9Chapter 2.3 --- Sample preparation --- p.12Chapter 2.4 --- Sheet resistivity measurements --- p.14Chapter 2.5 --- Rutherford backscattering spectroscopy (RBS) --- p.17Chapter 2.6 --- Transmission electron microscopy (TEM) --- p.19Chapter 2.6.1 --- Transmission electron microscopy (TEM) sample preparation --- p.21Chapter 2.7 --- Atom force microscopy (AFM) and conducting AFM --- p.31Chapter Chapter 3. --- Characterisation of As-implanted SamplesChapter 3.1 --- Experimental detailsChapter 3.1.1 --- Sheet resistance measurements --- p.33Chapter 3.1.2 --- Rutherford backscattering spectroscopy (RES) --- p.36Chapter 3.1.3 --- Sputtering depth measurements --- p.43Chapter 3.1.4 --- Transmission electron microscopy (TEM) --- p.44Chapter 3.1.5 --- Spreading resistance profiling (SRP) --- p.61Chapter 3.1.6 --- Atom force microscopy (AFM) and conducting AFM --- p.64Chapter 3.2 --- Results and discussion --- p.71Chapter 3.3 --- Summary --- p.81Chapter Chapter 4. --- Characterisation of Annealed SamplesChapter 4.1 --- Experimental detailsChapter 4.1.1 --- Rutherford backscattering spectroscopy (RBS) --- p.82Chapter 4.1.2 --- Transmission electron microscopy (TEM) --- p.87Chapter 4.1.3 --- Sheet resistance measurements --- p.98Chapter 4.2 --- Summary --- p.101Chapter Chapter 5. --- Conclusion --- p.102AppendixReferenc