Field emission properties of a silicon tip array.

Fung Yun Ming.Thesis (M.Phil.)--Chinese University of Hong Kong, 2001.Includes bibliographical references (leaves 134-140).Abstracts in English and Chinese.Abstract --- p.IAcknowledgement --- p.IIIContents --- p.IVList of Figure captions --- p.VIIIList of Table captions --- p.XIIIChapter Chapter 1 --- Introduction --- p.1Chapter Chapter 2 --- Theory and ApplicationsChapter 2.1 --- Principle of field emissionChapter 2.1.1 --- The Fowler-Nordheim Theory --- p.3Chapter 2.1.2 --- Field emission from metals --- p.6Chapter 2.1.3 --- Field emission from semiconductors --- p.8Chapter 2.1.3.1 --- Advantages and limitations of silicon --- p.9Chapter 2.1.4 --- Application of the Fowler-Nordheim theory --- p.10Chapter 2.1.5 --- Factors influencing field emission efficiency --- p.11Chapter 2.2 --- Applications --- p.11Chapter 2.2.1 --- Operation of a Field Emission Displays --- p.11Chapter 2.2.2 --- Basic structure of a Field Emission Displays --- p.13Chapter 2.2.3 --- Parameters relevant to applications --- p.15Chapter 2.3 --- The fabrication processes --- p.17Chapter 2.3.1 --- The anisotropic wet etching method --- p.18Chapter 2.3.2 --- The isotropic wet etching method --- p.19Chapter 2.3.3 --- Field emission from coating materials --- p.20Chapter 2.3.3.1 --- Coating enhancement --- p.20Chapter 2.3.3.2 --- Diamond and diamond-like films --- p.21Chapter 2.3.3.3 --- Metallic coatings --- p.22Chapter 2.3.3.4 --- Porous silicon coatings --- p.22Chapter 2.3.3.5 --- Silicon carbide coatings --- p.22Chapter 2.3.4 --- Fabrication of field emitters with gate --- p.23Chapter Chapter 3 --- Sample Preparation and Characterization MethodsChapter 3.1 --- Sample preparation --- p.25Chapter 3.2 --- The fabrication processChapter 3.2.1 --- Isotropic etching of siliconChapter 3.2.1.1 --- The anodization process --- p.25Chapter 3.2.1.2 --- Porous silicon formation --- p.26Chapter 3.2.2 --- Anistropic etching of silicon --- p.27Chapter 3.2.3 --- The sputtering system --- p.28Chapter 3.2.4 --- The MEVVA Ion Source Implanter --- p.30Chapter 3.3 --- Characterization MethodsChapter 3.3.1 --- Atomic Force Microscopy (AFM) --- p.32Chapter 3.3.2 --- Scanning Electron Microscopy (SEM) --- p.34Chapter 3.3.3 --- Field emission measurementChapter 3.3.3.1 --- Vacuum requirements --- p.35Chapter 3.3.3.2 --- Testing systemChapter 3.3.3.3 --- Fluctuation of field emission --- p.38Chapter Chapter 4 --- Fabrication of Silicon Tips and their field emission charateristicsChapter 4.1 --- The anodization etching processChapter 4.1.1 --- Introduction --- p.40Chapter 4.1.2 --- Experimental details --- p.42Chapter 4.1.3 --- Results and DiscussionsChapter 4.1.3.1 --- N type (100) sample --- p.45Chapter 4.1.3.2 --- Ntype(lll) sample --- p.60Chapter 4.1.3.3 --- Fluctuations of the emission current --- p.64Chapter 4.1.3.4 --- The effect of Concentration of HF solution on First Step Anodization --- p.68Chapter 4.1.3.5 --- The effect of the Concentration of HF solution on Second Step Anodization --- p.70Chapter 4.1.3.6 --- Gated silicon field emitter --- p.70Chapter 4.1.4 --- Conclusions --- p.73Chapter 4.2 --- Anisotropic texturing processChapter 4.2.1 --- Introduction --- p.74Chapter 4.2.2 --- Experimental details --- p.76Chapter 4.2.3 --- Results and Discussions --- p.78Chapter 4.2.4 --- Conclusion --- p.92Chapter 4.3 --- Formation of Porous Silicon Layer on siliconChapter 4.3.1 --- Introduction --- p.93Chapter 4.3.2 --- Experimental details --- p.94Chapter 4.3.3 --- Results and Discussions --- p.95Chapter 4.3.4 --- Conclusion --- p.100Chapter 4.4 --- Chapter Summary --- p.101Chapter Chapter 5 --- Improvement in the field emission characteristics of the silicon tips upon coating with low work function materialsChapter 5.1 --- Amorphous carbon coatingChapter 5.1.1 --- Introduction --- p.102Chapter 5.1.2 --- Experimental details --- p.103Chapter 5.1.3 --- Results and Discussions --- p.104Chapter 5.1.4 --- Conclusion --- p.118Chapter 5.2 --- Silicon carbide coated Silicon emitter by MEWAChapter 5.2.1 --- Introduction --- p.119Chapter 5.2.2 --- Experimental details --- p.120Chapter 5.2.3 --- Results and Discussions --- p.121Chapter 5.2.4 --- Conclusion --- p.125Chapter 5.3 --- Chapter Summary --- p.126Chapter Chapter 6 --- Conclusions --- p.127Reference --- p.134List of publications --- p.14