Photodiode design and simulation using Synopsys TCAD Sentaurus tools

Includes bibliographical references (leaves 48-49)The fabrication process design and electrical simulation of an excimer laser Silicon photodiode is proposed utilizing Synopsys Sentaurus modeling software tools. The problem provided consists of given mechanical, chemical, and electrical specifications of a p-n photodiode and design it in accordance to such parameters in addition to the implemented theory learned in class. The intricate and cumbersome fabrication process emulation showed the manufacturing steps that the silicon material goes through including tooling use (i.e. etching) and annealing/firing application steps. Careful considerations had to be taken to model the component equal or close to the given problem's electrical and mechanical expectations. The component was to be operated under photovoltaic (OV unbiased) and photoconductive (235V rev. bias) modes. The diffusion process was the optimum fabrication technique, which allowed the mechanical constraints such as N-channel thickness (~0.6?m) possible. It is determined that this part of the fabrication process (channel thickness) was paramount to the performance of the device at reverse bias mode due to the modulation of the channel cross section and generated carrier when applying an optical beam, in our case a l 92nm wave length excimer laser. The material composition and electrical results such as doping profile built-in voltage, breakdown voltage, electric field, space charge, and current density have been detennined to evaluate all conditions of the device. Furthermore the emitted energy of laser (in Joules) vs. the Charge inside the photodiode (Coulombs) is used to evaluate the responsivity. Therefore, all outcomes on different mechanical and electrical results taking into account the diffusion and other fabrication processes involved replicate the capabilities of this powerful software