Metal ions were extracted from pulsed discharge plasmas operating in the transition region between vacuum spark (transient high voltage of kV) and vacuum arc (arc voltage ~;; 20 V). At a peak current of about 4 kA, and with a pulse duration of 8 ?s, we observed mean ion charges states of about 6 for several cathode materials. In the case of platinum, the highest average charge state was 6.74 with ions of charge states as high as 10 present. For gold we found traces of charge state 11, with the highest average charge state of 7.25. At currents higher than 5 kA, non-metallic contaminations started to dominate the ion beam, preventing further enhancement of the metal charge states
Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge s...
Cathodic arcs have been utilized in various applications including the deposition of thin films and ...
Ion implantation energy can in principal be increased by increasing the charge states of the ions pr...
Metal ions were extracted from pulsed discharge plasmas operating in the transition region between v...
We consider the charge state distribution of ions produced in the metal vapor vacuum arc plasma disc...
Short-pulse, high-current discharges in vacuum were investigated with the goal to maximize the ion c...
We have studied the charge state distribution of the ion beam produced by the MEVVA (metal vapor vac...
Vacuum arc ion sources, commonly also known as "Mevva" ion sources, are used to generate intense pu...
Multiply charged ions are present in vacuum arc plasmas. The ions are produced at cathode spots, and...
Ion charge state distributions of cathodic vacuum arcs have been investigated using a modified time-...
The paper reviews the results of vacuum arc experimental investigations made collaboratively by rese...
Cathodic arc plasmas are considered fully ionized and they contain multiply charged ions, yet, gase...
Vacuum arc ion sources, commonly also known as "Mevva" ionsources, are used to generate intense puls...
Cathodic vacuum arc plasmas are known to contain multiply charged ions. 20 years after “Pressure Ion...
Thallium arc plasma was investigated in a vacuum arc ionsource. As expected from previous considerat...
Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge s...
Cathodic arcs have been utilized in various applications including the deposition of thin films and ...
Ion implantation energy can in principal be increased by increasing the charge states of the ions pr...
Metal ions were extracted from pulsed discharge plasmas operating in the transition region between v...
We consider the charge state distribution of ions produced in the metal vapor vacuum arc plasma disc...
Short-pulse, high-current discharges in vacuum were investigated with the goal to maximize the ion c...
We have studied the charge state distribution of the ion beam produced by the MEVVA (metal vapor vac...
Vacuum arc ion sources, commonly also known as "Mevva" ion sources, are used to generate intense pu...
Multiply charged ions are present in vacuum arc plasmas. The ions are produced at cathode spots, and...
Ion charge state distributions of cathodic vacuum arcs have been investigated using a modified time-...
The paper reviews the results of vacuum arc experimental investigations made collaboratively by rese...
Cathodic arc plasmas are considered fully ionized and they contain multiply charged ions, yet, gase...
Vacuum arc ion sources, commonly also known as "Mevva" ionsources, are used to generate intense puls...
Cathodic vacuum arc plasmas are known to contain multiply charged ions. 20 years after “Pressure Ion...
Thallium arc plasma was investigated in a vacuum arc ionsource. As expected from previous considerat...
Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge s...
Cathodic arcs have been utilized in various applications including the deposition of thin films and ...
Ion implantation energy can in principal be increased by increasing the charge states of the ions pr...