Parylene Microfluidic Channel and Plumbing Technology

It is desirable that in analytical microfluidic systems such as chip-based liquid chromatography that fluidic channel structure is robust enough so to avoid channel fracture at high pressure operation. In addition, the system fluidic dead volume should be minimized so to enhance analysis quality or shorten the analysis time. We demonstrate here using parylene thin film technology to fabricate channel configurations which provide pressure capacity above 1000 psi. Also, practical solutions for chip packaging and fluidic coupling to off-chip world that guarantee leak-free interface and minimal system dead volume are provided