Characterization Of High-Stroke High-Aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors For Adaptive Optics

AbstractCharacterization Of High-Stroke High-Aspect Ratio Micro Electro Mechanical Systems Deformable Mirrors For Adaptive OpticsMohamed Amine BouchtiAdaptive optics MEMS deformable mirror, in conjunction with Shack Hartman wave front sensor and real-time controller, is capable of correcting time-varying aberrations in imaging applications through manipulating its mirror surface. Adaptive optics systems in astronomy for next generation large telescopes (30 meter primary mirrors) require a high stroke of 10μm of mechanical displacement. This required stroke would be achieved by MEMS deformable mirrors fabricated with high aspect ratio techniques.This thesis will review the designs of various types of high aspect actuators consisting of folded springs with rectangular and circular membranes as well as X-beam actuators. Finite element analysis (FEA) simulations of these designs have shown the ability of each design to achieve a stroke of approximately 9.4 µm. Also, FEA simulations proved that the X-beam actuators provide the best spring support while preventing tilting.In addition, this thesis will discuss device characterization and voltage vs. displacement test results for the high aspect ratio gold MEMS 16 x 16 X-beam actuators deformable mirror that has been bonded and packaged. The results have shown that the device is capable of achieving approximately 5.5 µm in individual actuator testing and 7µm in dual actuator testing