Helicon discharges and sources: a review

Helicon waves are waves in low-temperature, partially ionized plasmas in a dc magnetic field (B-field). The study of helicons involves both ion-neutral collisions and Larmor orbits, even when the B-field is uniform. Helicon discharges are ionized by helicon waves generated by a radiofrequency (RF) antenna. Interest in helicon discharges arose because of the high plasma densities they generate compared with other RF sources at comparable powers. The semiconductor industry has not taken advantage of this, even since the possible use of permanent magnets for the B-field has been demonstrated. Nonetheless, a large literature on helicons has evolved because of the numerous problems these discharges posed and the interesting physics found in their solutions