Обеспечение качества поверхности деталей с вакуумно-плазменными покрытиями

The influence of basis surface conditions and a droplet component of a condensed plasma stream on a quality of a surface of formed metal-silicon-nitrogen coverings is researched. It is installed, that a character of changes of covering’s surface roughness from size of the accelerating potential and an arc current doesn’t depend on a covering material. At an estimation of a covering surface roughness it is necessary to consider its dependence on thickness of a besieged layer and, in case of multicomponent coverings, structure of a cathode material