The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics

  • Schulberg, Michelle Tobi.
Publication date
January 1990
Publisher
Massachusetts Institute of Technology

Abstract

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990Includes bibliographical references.by Michelle Tobi Schulberg.Ph. D.Ph. D. Massachusetts Institute of Technology, Department of Chemistr

Extracted data

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