Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer

A microelectromechanical (MEMS) Fabry-Perot interferometer includes a transparent substrate; a first metallic mirror structure on the transparent substrate, including a first metal layer and a first support layer; a second metallic mirror structure above the first metallic mirror structure on an opposite side of the first metallic mirror structure in view of the transparent substrate, the second metallic mirror structure including a second metal layer and a second support layer, wherein the first and the second support layer are parallel and including at least one of aluminum oxide or titanium dioxide; a Fabry-Perot cavity between the first and the second support layer, whereby the Fabry-Perot cavity is formed by providing an insulation layer on the first mirror structure, and at least partially removing the insulation layer after providing the second mirror structure; and electrodes for providing electrical contacts to the first and the second metal layer.Patent family as of15.12.2021CN110809711 A 20200218 CN201880043636 20180629 EP3635351 A1 20200415 EP20180828785 20180629 EP3635351 A4 20200617 EP20180828785 20180629 FI128101 B 20190930 FI20170005641 20170703 FI20175641 A 20190104 FI20170005641 20170703 JP2020525830 T2 20200827 JP20190571313T 20180629 JP6870123 B2 20210512 JP20190571313T 20180629 US10732041 BB 20200804 US20190721975 20191220 US2020124475 AA 20200423 US20190721975 20191220 WO19008229 A1 20190110 WO2018FI50520 20180629Link to currentpatent family on right