Micromechanical resonator and method for trimming micromechanical resonator

The present disclosure describes micromechanical resonator, a resonator element for the resonator, and a method for trimming the resonator. The resonator comprises a resonator element having a length, a width, and a thickness, where the length and the width define a plane of the resonator element. The resonator element comprises at least two regions (52, 53) in the plane of the resonator element, wherein the at least two regions have different thicknesses.Patent family as of 14.12.2021CN109417368 A 20190301 CN201780040390 20170629 EP3479475 A1 20190508 EP20170746527 20170629 FI127940 B 20190531 FI20160005556 20160701 FI20165556 A 20180102 FI20160005556 20160701 JP2019521604 T2 20190725 JP20180568297T 20170629 KR20190024976 A 20190308 KR20197002443 20170629 US10965267 BB 20210330 US20180314125 20170629 US2019173451 AA 20190606 US20180314125 20170629 WO18002440 A1 20180104 WO2017FI50487 20170629Link to currentpatent family on right