Micromechanical resonator

The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length (l1) and a width (w1) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a support structure with two or more anchors (41, 43). Each of the two or more anchors is attached to a first location or a second location. The first location is at a shorter side (42) of the resonator element. The first location divides the width (w1) of the resonator element into a larger portion (w3) and a smaller portion (w2) such that a ratio between said smaller portion (w2) and the whole width (w1) is in a range of 0.10 to 0.28. The second location is at a longer side (44). The second location divides the length (l1) of the resonator element into a larger portion (l3) and a smaller portion (l2) such that a ratio between said smaller portion (l2) and the whole length (l1) is in a range of 0.36 to 0.48.Patent family as of 14.12.2021CN109417373 A 20190301 CN201780040389 20170629 DE602017009446 D1 20191224 DE201760009446T 20170629 EP3479477 A1 20190508 EP20170746152 20170629 EP3479477 B1 20191204 EP20170746152 20170629 FI127787 B 20190228 FI20160005553 20160701 FI20165553 A 20180102 FI20160005553 20160701 JP2019525548 T2 20190905 JP20180568200T 20170629 KR20190026784 A 20190313 KR20197002410 20170629 US10931255 BB 20210223 US20180313655 20170629 US2019173450 AA 20190606 US20180313655 20170629 WO18002439 A1 20180104 WO2017FI50486 20170629Link to currentpatent family on right