We present here a novel experimental/numerical protocol to extract the fracture toughness of the thin film/substrate interface. The testing method involves using a laser-induced acoustic stress wave to load the film/substrate fracture plane in tension at very high strain rate (~10^7/s) leading to the inertia-driven interface delamination. A weak adhesive layer is selectively introduced at the interface to serve as a pre-crack exploiting the inertial effect to obtain stable crack growth. The kinetic energy imparted to the weakly bonded region of the film is converted into fracture energy as the thin film delaminates in a controlled fashion. To support the dynamic experiment in extracting the interface fracture toughness values, we develop a ...
The conventional approach to analysis of thin film delamination is based on the consideration of the...
Interfacial delamination has been a major reliability issue for both BEoL and packaging systems. The...
The conventional approach to analysis of thin film delamination is based on the consideration of the...
We present here a novel experimental/numerical protocol to extract the fracture toughness of the thi...
Thin film adhesion often determines microelectronic device reliability and it is therefore essential...
Adhesive failure and the attendant delamination of a thin film on a substrate is controlled by the f...
A novel dynamic adhesion test is being developed to extract quantitative fracture parameters using l...
100 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.A more complete description o...
100 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.A more complete description o...
textDifferent fracture modes have been observed in thin film structures. One common approach used in...
Laser induced stress waves are used to characterize intrinsic interfacial strength of thin films und...
textDifferent fracture modes have been observed in thin film structures. One common approach used in...
Laser induced stress waves are used to characterize intrinsic interfacial strength of thin films und...
Motivated by recent developments in laser-induced spallation testing of thin film structures, we dev...
The interface toughness of a thin coating/compliant substrate system is estimated based on the evolu...
The conventional approach to analysis of thin film delamination is based on the consideration of the...
Interfacial delamination has been a major reliability issue for both BEoL and packaging systems. The...
The conventional approach to analysis of thin film delamination is based on the consideration of the...
We present here a novel experimental/numerical protocol to extract the fracture toughness of the thi...
Thin film adhesion often determines microelectronic device reliability and it is therefore essential...
Adhesive failure and the attendant delamination of a thin film on a substrate is controlled by the f...
A novel dynamic adhesion test is being developed to extract quantitative fracture parameters using l...
100 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.A more complete description o...
100 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.A more complete description o...
textDifferent fracture modes have been observed in thin film structures. One common approach used in...
Laser induced stress waves are used to characterize intrinsic interfacial strength of thin films und...
textDifferent fracture modes have been observed in thin film structures. One common approach used in...
Laser induced stress waves are used to characterize intrinsic interfacial strength of thin films und...
Motivated by recent developments in laser-induced spallation testing of thin film structures, we dev...
The interface toughness of a thin coating/compliant substrate system is estimated based on the evolu...
The conventional approach to analysis of thin film delamination is based on the consideration of the...
Interfacial delamination has been a major reliability issue for both BEoL and packaging systems. The...
The conventional approach to analysis of thin film delamination is based on the consideration of the...