Humidity Sensor Thanks Array of Suspended Gate Field Effect Transistor

International audienceThis work deals with a sensor using array of Suspended Gate Field Effect Transistor (SGFET) to measure the relative humidity (%RH). Technics of microtechnology are used to fabricate a polysilicon bridge with a gap de 0,5 μm which acts as transistor gate. Electrical measures have been realized by sampling mode, involving a sensitivity of -5 μA/%. Also the SGFET humidity sensors are very interesting due to the simplicity to polarize and to analyze the output signal