International audienceLaser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and d...
Translated from Russian (Fiz. Khim. Obrab. Mater. 1988 v. 22(4) p. 5-15)Available from British Libra...
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures212706-709JVTB
An overview of the vast array of the laser material processing techniques is presented as they apply...
International audienceLaser Annealing Processes in Semiconductor Technology: Theory, Modeling and Ap...
Laser annealing (LA) is an emerging technique that has the potential to be incorporated into the dev...
Laser annealing technology is used in mass production of new-generation semiconductor materials and ...
This book covers various aspects of lasers in materials science, including a comprehensive overview ...
This book gives an overview of the fundamentals and applications of laser-matter interactions, in pa...
Because of its capacity for continuous development and flexibility of use, the laser has become a m...
In this chapter we consider the important optical and electronic processes which influence the prope...
In this chapter we consider the important optical and electronic processes which influence the prope...
This unique resource explains the fundamental physics of semiconductor nanolasers, and provides deta...
We present a thermal transport model to describe the melting and resolidification of semiconductors ...
The continuous scaling of gate dimensions has created a strong need for better ultrashallow junction...
The use of lasers for industrial, scientific, and medical applications has received an enormous amou...
Translated from Russian (Fiz. Khim. Obrab. Mater. 1988 v. 22(4) p. 5-15)Available from British Libra...
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures212706-709JVTB
An overview of the vast array of the laser material processing techniques is presented as they apply...
International audienceLaser Annealing Processes in Semiconductor Technology: Theory, Modeling and Ap...
Laser annealing (LA) is an emerging technique that has the potential to be incorporated into the dev...
Laser annealing technology is used in mass production of new-generation semiconductor materials and ...
This book covers various aspects of lasers in materials science, including a comprehensive overview ...
This book gives an overview of the fundamentals and applications of laser-matter interactions, in pa...
Because of its capacity for continuous development and flexibility of use, the laser has become a m...
In this chapter we consider the important optical and electronic processes which influence the prope...
In this chapter we consider the important optical and electronic processes which influence the prope...
This unique resource explains the fundamental physics of semiconductor nanolasers, and provides deta...
We present a thermal transport model to describe the melting and resolidification of semiconductors ...
The continuous scaling of gate dimensions has created a strong need for better ultrashallow junction...
The use of lasers for industrial, scientific, and medical applications has received an enormous amou...
Translated from Russian (Fiz. Khim. Obrab. Mater. 1988 v. 22(4) p. 5-15)Available from British Libra...
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures212706-709JVTB
An overview of the vast array of the laser material processing techniques is presented as they apply...