Incompressible limit for the free surface Navier-Stokes system

93 pages, comments are welcome!We establish uniform regularity estimates with respect to the Mach number for the three-dimensional free surface compressible Navier-Stokes system in the case of slightly well-prepared initial data in the sense that the acoustic components like the divergence of the velocity field are of size $\sqrt{\varepsilon}$, $\varepsilon$ being the Mach number. These estimates allow us to justify the convergence towards the free surface incompressible Navier-Stokes system in the low Mach number limit. One of the main difficulties is the control of the regularity of the surface in presence of boundary layers with fast oscillations