Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by Voice Coil Actuator

This paper proposes a flexure-based nano-positioning device which can yield +/- 2mm motion range with nearly linear relationship between input current and output displacement. The voice coil actuator (VCA) applies Halbach permanent magnet array whose thrust and force ripple are accurately modeled based on gap magnetic field analysis. The thrust model is verified by Finite Element Analysis (FEA) and VCA parameters are optimized by Genetic Algorithm (GA). The VCA coil skeleton with three coils is supported by flexure-based membranes. The membrane consists of bend segments and torsion segments which are connected in S shape. Equivalent models are applied to predict the stiffness of the membrane. At last, the force-displacement curve of VCA and displacement-force curve of the flexure-based membrane are obtained by experiments. The results validate the correctness of the developed model and the feasibility of the design