Plasma pretreatment of polymers to optimize the adhesion of coatings

Parylene-C is used for various biomedical devices because of its high conformity and biocompatibility. However, delamination could occur because of low adhesion between Parylene-C and other materials. For this experiment 4-inch Si-wafers are used. Parylene is deposited by chemical vapour deposition (CVD). Silane A-174 as adhesion promoter is added between Parylene-Parylene layers. The samples are soaked at different duration 1 h, 24 h and 120 h in PBS solution at 37 °C. A peel test is further performed to investigate the adhesion properties of the samples