A modification of the conventional hybrid Monte Carlo - fluid model for glow discharge, which incorporates the electron energy equation, is considered. In the proposed model electrons are separated into two groups, namely, high energetic fast and low energetic slow (bulk) electrons. Density profiles of ions, slow electrons, and meta-stable particles are determined from the solution of corresponding continuity equations. Fast electrons, which are responsible for ionization and excitation events in the discharge, are simulated by the Monte-Carlo method. The temperature profile for slow electrons is obtained from the solution of the energy balance equation. The transport (mobility and diffusion) coefficients as well as the reaction rates for s...
The mixture of argon and mercury vapor is used as the background gas in different types of gas disch...
A kinetic model is reported computing the electron behavior in a hollow cathode discharge based on t...
The semiconductor industry is dependent on the use of plasma processing techniques for many steps in...
An improved hybrid Monte Carlo-fluid model for electrons, argon ions and fast argon atoms, is presen...
Two-dimensional hybrid Monte Carlo-fluid numerical code is developed and applied to model the dc glo...
A hybrid Monte Carlo-fluid model has been developed for the electrons, argon ions and fast argon ato...
A hybrid Monte Carlo-fluid model has been developed for the description of electrons, argon ions, an...
A hybrid model has been developed for a capacitively coupled rf glow discharge in argon, employed as...
We developed and tested 2D "extended fluid model" of a dc glow discharge using COMSOL MULTIPHYSICS s...
There is increasing interest in glow discharges because of their importance to a large number of app...
Computer modeling (simulation) of rf glow discharges is a very useful and potentially accurate tool ...
Fluid models for gas discharges are based on restrictive assumptions for the electron-energy distrib...
We developed and tested a simple hybrid model for a glow discharge, which incorporates nonlocal ioni...
We developed and tested two dimensional (axial-symmetric) models of a dc glow discharge in low press...
We developed and tested a simple hybrid model for a glow discharge, which incorporates nonlocal ioni...
The mixture of argon and mercury vapor is used as the background gas in different types of gas disch...
A kinetic model is reported computing the electron behavior in a hollow cathode discharge based on t...
The semiconductor industry is dependent on the use of plasma processing techniques for many steps in...
An improved hybrid Monte Carlo-fluid model for electrons, argon ions and fast argon atoms, is presen...
Two-dimensional hybrid Monte Carlo-fluid numerical code is developed and applied to model the dc glo...
A hybrid Monte Carlo-fluid model has been developed for the electrons, argon ions and fast argon ato...
A hybrid Monte Carlo-fluid model has been developed for the description of electrons, argon ions, an...
A hybrid model has been developed for a capacitively coupled rf glow discharge in argon, employed as...
We developed and tested 2D "extended fluid model" of a dc glow discharge using COMSOL MULTIPHYSICS s...
There is increasing interest in glow discharges because of their importance to a large number of app...
Computer modeling (simulation) of rf glow discharges is a very useful and potentially accurate tool ...
Fluid models for gas discharges are based on restrictive assumptions for the electron-energy distrib...
We developed and tested a simple hybrid model for a glow discharge, which incorporates nonlocal ioni...
We developed and tested two dimensional (axial-symmetric) models of a dc glow discharge in low press...
We developed and tested a simple hybrid model for a glow discharge, which incorporates nonlocal ioni...
The mixture of argon and mercury vapor is used as the background gas in different types of gas disch...
A kinetic model is reported computing the electron behavior in a hollow cathode discharge based on t...
The semiconductor industry is dependent on the use of plasma processing techniques for many steps in...