VALIDATION OF THE PARTICLE IN CELL MONTE CARLO COLLISION NUMERICAL CODE FOR THE RF DISCHARGE SIMULATION

We developed 1d3v Particle in Cell/Monte Carlo Collision (PIC/MCC) numerical code for the RF (radio-frequency) capacitive glow discharge. This method includes the solution of the Lorentz force equation for the motion of super particles and the Poisson equation for the electric field. Collisions between the particles are modeled with the Monte Carlo method. In this process, the isotropic and charge exchange collisions between the ion-neutral pairs, as well as the elastic, excitation and ionization collisions between the electron-neutral pairs are taken into account. Test calculations were carried out and numerical code was validated by comparison with the published simulation results