Geniş bant aralığına sahip yüksek hassasiyetli mems dönüölçer.

This thesis reports the development of a wide-bandwidth high-sensitivity mode-decoupled MEMS gyroscope showing robustness against ambient pressure variations. The designed gyroscope is based on a novel 2 degrees of freedom (DoF) sense mode oscillator, which allows increasing the operation bandwidth to the amount required by tactical-grade and inertial-grade operations while reaching the mechanical sensitivity of near matched-mode vibratory gyroscopes. Thorough theoretical study and finite element simulations verify the high performance operation of the proposed 2 DoF sense mode oscillator design. The designed gyroscope is fabricated using the in-house developed silicon-on-glass (SOG) micromachining technology at METU Microelectronics (METU-MET) facilities. The fabricated gyroscope measures only 5.1 x 4.6 mm square. The drive mode oscillator of the gyroscope reaches quality factor of 8760 under 25 mTorr vacuum environment, owing to high quality single crystal silicon structural layer. The sense mode bandwidth is measured to reach 2.5 kHz at 40 V proof mass voltage. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1kHz, measurements show a relatively high raw mechanical sensitivity of 131 uV/(deg/s). Fabricated gyroscope is hybrid connected to external closed-loop drive mode amplitude control and open-loop sense mode readout electronics developed at METU-MEMS research group, to form a complete angular rate measurement system (ARMS). The scale factor of the ARMS is measured to be 13.1 mV/(deg/s) with a maximum R square nonlinearity of 0.0006 % and a maximum percent deviation nonlinearity of 0.141 %, while the maximum deviation of the scale factor for large vacuum level variations between 40 mTorr to 500 mTorr is measured to be only 0.38 %. The bias stability and angle random walk of the gyroscope are measured to be 131 deg/h and 1.15 deg/ rooth, respectively. It is concluded that, the mechanical structure can be optimized to show its theoretical limits of sensitivity with improvements in fabrication tolerances. The proposed 2 DoF sense mode oscillator design shows the potential of tactical-grade operation, while demonstrating extreme immunity to ambient pressure variations, by utilizing an optimized mechanical structure and connecting the gyroscope to dedicated low-noise electronics.M.S. - Master of Scienc