Structure and Properties of TiO₂/nanoTiO₂ Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on 316L Steel Substrate

This paper presents the synergy of the effect of two surface engineering technologies—magnetron sputtering (MS-PVD) and atomic layer deposition (ALD) on the structure and properties of 316L steel. Recent studies indicate that PVD coatings, despite their thickness of a few micrometers, have many discontinuities and structural defects, which may lead to pitting corrosion after time. Applying an ALD layer to a PVD coating seals its structure and contributes to extending the service life of the coating. Investigations of the structure and morphology of the produced layers were carried out using a scanning electron microscope (SEM) and atomic force microscope (AFM). In addition, the structure of the coatings was investigated on the cross-section using a scanning-transmission electron microscope S/TEM. The tribological properties of the materials studied were determined by the ball-on-disc method. The corrosion resistance of the tested materials was determined by the electrochemical potentiodynamic method by recording the polarization curves of the anodes. Additional information about the electrochemical properties of the tested samples, including the quality, their tightness, and their resistivity, was obtained by electrochemical impedance spectroscopy (EIS). In addition, the main mechanisms of corrosion and tribological wear were determined by SEM observations after corrosion tests and after tribological tests. The study showed that the fabrication of hybrid layers by MS-PVD and ALD techniques allows obtaining coatings with electrochemical properties superior to those of layers fabricated by only one method