Deposition and analysis of AlCrN coatings

The topic of this thesis is the deposition process and methods of quality assessment of AlCrN surface coatings produced by methods of (i) magnetron sputtering, (ii) magnetron sputtering with arc enhanced glow discharge, and (iii) high power magnetron sputtering with the movable magnetic field. The main focus is placed on categorizing properties of the produced coatings based on the production method (which vary in the ionization level). Qualities of the surface coatings are assessed by adhesion and cohesion parameters testing of coarseness using AFM (Atomic Force Microscopy), depth measuring using a calotest, measuring internal tension using the Bent Strip Method and Instrumented indentation test for hardness