Gas-phase diagnoses in catalytic chemical vapor deposition (hot-wire CVD) processes

NOTICE: this is the author’s version of a work that was accepted for publication in Thin Solid Films. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Thin Solid Films, Volume 575, 30 January 2015. doi:10.1016/j.tsf.2014.10.014application/pdfjournal articl