Segmented hyperpure germanium detector

The segmentation process of high purity germanium detectors (HPGe) is here described. A photolithography technique is used to obtain a segmented gamma detector. The photolithography is applied on a planar square detector where the junction/contact region is covered with a gold thin film. Small segmented detectors are characterized to verify the quality of the photolithography process. Optical and scanning microscopy measures (SEM) are used to analyse the quality of the segmentation and to improve the photolithography process parameters. Finally, the leakage current of the diode and the passivation resistance between electrodes are studied and discusse