An alternative method to determine oxygen concentration in industrial monocrystalline silicon has been developed and tested, resorting to statistical analysis and modeling. The model has been applied to different set samples, with a prediction accuracy varying between 90% and 95%. This model works on the assumption of a very effective heat treatment for thermal donor killing and similar thermal history of the produced/analyzed ingots
The concentration of nitrogen and oxygen in semiconductor silicon and their solubilities in silicon ...
A new control technique of oxygen concentration in p-type CZ silicon crystal was developed from inve...
The role of oxygen concentration on the formation/evolution of residual defects in implanted and rap...
Tese de mestrado integrado em Engenharia da Energia e do Ambiente, apresentada à Universidade de Lis...
AbstractIn this paper a method is presented to accurately and readily measure the interstitial oxyge...
The distribution of oxygen in silicon melts kept in a 14" diameter silica crucible of a standard Czo...
A model for the dynamic oxygen concentration i silicon melts during Czo-chralski growth is presented...
We studied the mechanism of oxygen transfer from a quartz crucible to a multicrystalline silicon dur...
This work demonstrates a correlation between the initial resistivity pattern and the final precipita...
It was determined that oxygen concentration in heavily Sb-doped silicon was about 40% lower than tha...
The microdistribution of oxygen in Czochralski-grown, p-type silicon crystals (75 mm in diameter and...
For the purpose of this thesis work, four n-type CZ silicon ingots with different crown tapered angl...
The present status and special features of experimental analysis and numerical modelling of oxygen t...
The focus of this master's thesis has been the formation of oxygen-related defects in the last 10 cm...
Thesis: S.B., Massachusetts Institute of Technology, Department of Materials Science and Engineering...
The concentration of nitrogen and oxygen in semiconductor silicon and their solubilities in silicon ...
A new control technique of oxygen concentration in p-type CZ silicon crystal was developed from inve...
The role of oxygen concentration on the formation/evolution of residual defects in implanted and rap...
Tese de mestrado integrado em Engenharia da Energia e do Ambiente, apresentada à Universidade de Lis...
AbstractIn this paper a method is presented to accurately and readily measure the interstitial oxyge...
The distribution of oxygen in silicon melts kept in a 14" diameter silica crucible of a standard Czo...
A model for the dynamic oxygen concentration i silicon melts during Czo-chralski growth is presented...
We studied the mechanism of oxygen transfer from a quartz crucible to a multicrystalline silicon dur...
This work demonstrates a correlation between the initial resistivity pattern and the final precipita...
It was determined that oxygen concentration in heavily Sb-doped silicon was about 40% lower than tha...
The microdistribution of oxygen in Czochralski-grown, p-type silicon crystals (75 mm in diameter and...
For the purpose of this thesis work, four n-type CZ silicon ingots with different crown tapered angl...
The present status and special features of experimental analysis and numerical modelling of oxygen t...
The focus of this master's thesis has been the formation of oxygen-related defects in the last 10 cm...
Thesis: S.B., Massachusetts Institute of Technology, Department of Materials Science and Engineering...
The concentration of nitrogen and oxygen in semiconductor silicon and their solubilities in silicon ...
A new control technique of oxygen concentration in p-type CZ silicon crystal was developed from inve...
The role of oxygen concentration on the formation/evolution of residual defects in implanted and rap...