Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These s...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized physical va...
The analysis the discharge processes in magnetron plasma, target sputtering processes, as well as nu...
The magnetron sputtering process has become established as the process of choice for the deposition ...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
There are several methods for growing single crystalline thin layers: chemical vapour deposition (CV...
Physical vapor deposited hard coatings are routinely being used in many industrial applications. Th...
Physical vapor deposited hard coatings are routinely being used in many industrial applications. Th...
Sputter deposition is an important technology, which is widely used in the production of thin films ...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge ...
Since the introduction of the planar magnetron by J.S. Chapin in 1974 magnetron sputtering has becom...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized physical va...
The analysis the discharge processes in magnetron plasma, target sputtering processes, as well as nu...
The magnetron sputtering process has become established as the process of choice for the deposition ...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
There are several methods for growing single crystalline thin layers: chemical vapour deposition (CV...
Physical vapor deposited hard coatings are routinely being used in many industrial applications. Th...
Physical vapor deposited hard coatings are routinely being used in many industrial applications. Th...
Sputter deposition is an important technology, which is widely used in the production of thin films ...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge ...
Since the introduction of the planar magnetron by J.S. Chapin in 1974 magnetron sputtering has becom...
Dynamic roughening is a common phenomenon observed in plasma processing of materials, including both...
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized physical va...
The analysis the discharge processes in magnetron plasma, target sputtering processes, as well as nu...