Materials Characterization Techniques at the NRC

Greg Book presented a lecture at the Nano@Tech Meeting on September 27, 2011 at 12 noon in room 1116 of the Marcus Nanotechnology Building.Gregory Book is currently a principal research engineer at Georgia Tech. He received his Ph.D. in Material Science from Georgia Tech in 1996, and his B.S. from Northwestern State University in 1991. After completion of his Ph.D., Greg worked for Intel Corp. in Hillsboro, OR as a senior process engineer developing the processes for the next generation of mirco chips. He also held the position of senior materials engineer, managing the R&D process at two different substrate suppliers in Japan and Taiwan. While at Georgia Tech Greg has focused on the recruitment of external researchers into the NRC.Runtime: 46:50 minutesWhen building up multiple layers of materials in fabricating CMOS, MEMS, optics, SAW and other nano and micro scale devices, understanding the material composition and properties is very important. The final operation of the devices greatly depends on the properties of the materials used in the device, as well as the interfacial interaction between layers of materials. Within the NRC exist a plethora of materials characterization techniques for both structural and chemical analysis. This talk will serve as a "Capability Passdown" to the NRC user base, as well as an explanation of how each technique works, and what information can be obtained from the available processes