The topic of this dissertation is the derivation, development, and evaluation of novel hybrid algorithms for process control that use a limited number of measurements and that are suitable to operate in the presence of large amounts of process noise. As an initial step, affine and neural network statistical process models are developed in order to simulate the steady-state system behavior. Such models are vitally important in the evaluation, testing, and improvement of all other process controllers referred to in this work. Afterwards, fuzzy logic controller rules are assimilated into a mathematical characterization of a model that includes the modes and mode transition rules that define a hybrid hierarchical process control. The main pr...
In order to produce products with constant quality, manufacturing systems need to be monitored for a...
Abstract—Optimizing the final grinding production indices (GPIs), which include the product particle...
Process control is essential in Industry 4.0, and process modeling is an effective way to achieve it...
Systems and methods for implementing hybrid, closed-loop control that generates control values for p...
Complex control algorithms are applied to manufacturing systems for certain process requirements, ac...
Neural networks are potential tools that can be used to improve process quality control. In fact, va...
After having established an offline process control based on the optical process diagnostic system P...
The cost of a fabrication line such as one in a semiconductor house has increased dramatically over ...
Methods for solving performance improvement problems in manufacturing processes, such as, for exampl...
AbstractThis paper presents a feedback control optimization framework for a sensor development and f...
This paper describes a generic dynamic control system designed for use in semiconductor fabrication ...
Abstract:- The most common goal of the factory owner is to achieve better quality in the final produ...
Neural networks have been applied within manufacturing domains, in particular electronics industries...
A new approach to printing process control is presented. Innovative methods for man-ufacturing proce...
The thesis focuses on the design and implementation of a control scheme for a photolithography proce...
In order to produce products with constant quality, manufacturing systems need to be monitored for a...
Abstract—Optimizing the final grinding production indices (GPIs), which include the product particle...
Process control is essential in Industry 4.0, and process modeling is an effective way to achieve it...
Systems and methods for implementing hybrid, closed-loop control that generates control values for p...
Complex control algorithms are applied to manufacturing systems for certain process requirements, ac...
Neural networks are potential tools that can be used to improve process quality control. In fact, va...
After having established an offline process control based on the optical process diagnostic system P...
The cost of a fabrication line such as one in a semiconductor house has increased dramatically over ...
Methods for solving performance improvement problems in manufacturing processes, such as, for exampl...
AbstractThis paper presents a feedback control optimization framework for a sensor development and f...
This paper describes a generic dynamic control system designed for use in semiconductor fabrication ...
Abstract:- The most common goal of the factory owner is to achieve better quality in the final produ...
Neural networks have been applied within manufacturing domains, in particular electronics industries...
A new approach to printing process control is presented. Innovative methods for man-ufacturing proce...
The thesis focuses on the design and implementation of a control scheme for a photolithography proce...
In order to produce products with constant quality, manufacturing systems need to be monitored for a...
Abstract—Optimizing the final grinding production indices (GPIs), which include the product particle...
Process control is essential in Industry 4.0, and process modeling is an effective way to achieve it...